Varian, Inc.
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inspiring excellence

Vacuum Pumps
Rotary Vane Pumps
Dry Scroll Pumps
Diffusion Pumps
Ion Pumps
Turbo Pumps

North America
Toll-free: 1.800.882.7426
E-mail
Europe
Toll-free: 00.800.234.234.00
E-mail
Additional Support
More Contact Info

Turbo Pumps

Features & Benefits

Broad product offering, from 70 to 6,000 l/s
? Covers all possible applications and market segments

State-of-the-art MacroTorr? Technology
? Maximizes the throughput.
? Extends the foreline pressure tolerance up to 18 bar.
? Increases the compression ration by decades.

Monolithic rotors
? Each rotor is machined from a single piece of aluminum alloy.
? Weight is minimized.
? Pumps may be operated in any position without compromise.
? Stresses on materials and bearings are reduced.

Highly reliable, maintenance-free ceramic ball bearings
? No oil, no contamination.
? Increased MTTF.

On-board controllers available for Navigator pumps
? Simple, space-saving configuration
? Navigator software eases remote control and monitoring.



Additional Vacuum Products
Turbo Pumping Systems
Leak Detection
Vacuum Measurement
Valves
Components

Support & Resources
Training
Customer Care
Typical Applications
Turbo Pumps Catalog
(.pdf, 1.2MB)
User Manauals